International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

The article studies the mechanisms of energy exchange and transformations, which occur in a measuring instrument (probe) of an atomic force microscope (AFM) in the process of studying solid surfaces of materials. Mathematical modeling of the heating process of individual elements of the measuring unit of the atomic force microscope at the preparatory, final stages and the scanning stage of the surface under study was carried out. At the same time, such energy components of the processes occurring in the AFM control unit were taken into account. By minimizing the factors (heat dissipation due to friction of the probe on the surface), which negatively affect both the results of the monitoring and the condition of the probe and the surface, stable operation modes of the AFM are established. The solution of the equivalent thermal scheme of an atomic force microscope is presented, which confirms the adequacy of the mathematical models obtained.

It has been established that in the study of a solid surface by atomic force microscopy, the hydrophobic interaction is more advantageous due to a decrease in the interaction forces between the probe and the liquid adsorbed on the surface under study. Despite the fact that silicon is a hydrophobic material, it has been shown that the material acquires hydrophilic properties in air, as a result of which the use of carbon-modified probes has been proposed. An approach to experimental statistical modeling is proposed, based on the experiment planning method, which shows that with a scanning speed of 12 μm / s, a scanning step of up to 82 nm and a delay time before scanning of 6 ms, the interaction force between the probe and the adsorbed liquid reaches minimum values. As a result of the research, it was found that with a decrease in the scanning speed, a scanning step and an increase in the delay time of the probe before measurement, the interaction between the probe and the liquid membrane is hydrophobic. It is shown that by changing the initial parameters, it is possible to control the hydrophobic interaction between the probe and the liquid. It has been established that increased air humidity leads to hydrophilic interaction. This is due to the increase in the thickness of the adsorbed liquid layer on the surface under study.

The results of microprocessing by the ribbon-shaped electron beam of the elements of optical measuring instruments (the material of such elements – K8 glass) with the initial nanorelief of surfaces 15-22 nm after industrial grinding and polishing are presented. Based on the results of studies using a computerized complex control system based on an atomic force microscope, it was established that after electron-beam microprocessing, the nanorelief of optical elements of measuring instruments decreased to 1.5-2.2 nm, satisfying to the requirements put forward to their surfaces.