International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

Based on the electron-beam technology we suggest the method that increases accuracy and extends the ranges of optoelectronic device measurement, and also increases the probability of their trouble-free operation under conditions of external thermal and mechanical actions. The method is based on the developed experimentally-statistical models to determine the complex influence of parameters of the electron beam on the physical-mechanical properties and optical characteristics in the surface layers of optical elements. at At the stage of device manufacturing this method allows forming a database of the superior physical and mechanical properties and the optical characteristics in the surface layers of optical elements depending on the electron beam parameters, by choosing the optimal regimes of their electron-beam processing, that allow maximizing the metrological characteristics of the devices.

Perspective development tendencies of electron-beam technology in precise instruments industry were introduced and after them the following results were obtained: 1. Capacity expansion of electron-beam technology in the optical-electronic instruments industry for obtaining high-quality curved surfaces and the creation of functional microprofiles on them of different geometric forms. A new method of more accurate and reliable processing of curved surfaces of optical elements (concave, buckled, spherical, cylindrical, etc.) was developed for this purpose. 2. Electron-beam surfaces processing of elements from piezoelectric ceramics. Modern production technologies of piezoelectric products are based on the known methods of mechanical, chemical and chemical-mechanical processing of the surfaces of piezoelectric materials, in particular ceramics. The main drawback of these methods is the impossibility of getting high electromechanical and strength characteristics of products from piezoelectric ceramics, which requires additional processing of these products. Electronradiation technology was used to exclude the mentioned negative defects on the surface of elements from piezoelectric ceramics. 3. Electronbeam processing of nanosized oxide coatings on optical elements. Nanosized oxide coating, which represent the composition of oxides SnO2, Bi2O3, TiO2, ZnO, SiO2, Al2O3 , are applied for improvement of wear resistance, reduction of radiation and convective components of thermal losses on optical elements of precision instruments industry. Thus, the resulting coatings are heterogeneous, contain hidden microdefects (cracks, chips, etc.), the surface contains significant microroughnesses and low microhardness, etc. All this reduces the performance characteristics of these coatings. Their electron beam processing was used for elimination of the mentioned shortcomings and improvement of the quality of these coatings.

The range of parameters of the electron beam (density of thermal effect Fn = 7∙106…8∙108 W/m² and travel speeds V = 5∙10-3…5∙10-2 m/s), within which there is an improvement in the performance characteristics of optical elements: increase of microhardness of the surface of elements from optical ceramics from 1,21∙103…2,83∙103MPa to 4,84∙103…7,15∙103 MPa and increase of the spectral transmission coefficient of IR-radiation by 4… 6% for elements of optical glass and for 5… 7% – for elements of optical ceramics; there occurs an increase in the critical values of the external heat flow leading to the destruction of the elements by 1,5…2 times, thus the increase of external pressure up to 107 Pa decreases the specified critical values by 1,3…1,5 times; critical values of thermoelastic stresses in optical elements at heating temperatures 300… 1200 K increase by 1,5…2,5 times, indicating an increase in resistance to thermal effects and increased external pressures of optical elements processed by an electronic beam; the values of critical heights of falling of a steel ball on their surface, leading to destruction of elements, increase from 0,18…1,1 m to 0,37…1,35 m, so, their resistance to mechanical shocks increases. It is established, that increase of durability of optical elements, processed by an electron beam, to external thermal and mechanical effects leads to the increase of probability of non-failure operation of optic-electronic devices under extreme conditions of operation to 10… 20%.

The optimal parameters of the ranges of the electron beam are found (heat density, velocity, displacement), within which there is improvement of the physical and mechanical properties of surface layers of optical elements: there is no formation of negative defects on their surfaces which become atomically smooth (residual microscopic ridges do not exceed 0.5… 1.5 nm); the microhardness of the surface increases, hardened layers are formed with compressive stresses. This leads to the reduction of the light scattering coefficient of surface layers of elements and increase of their coefficient of infrared radiation transmittance and, ultimately, to the improvement of metrological characteristics and reliability of devices under intensive external thermal action.