International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

The article describes the results of analysis of the two acoustic electronic resonators performed using the scanning probe microscope and the software developed in the graphical integrated development environment LabVIEW with the machine vision module NI LabVIEW Vision. The most important surface parameters were measured and analyzed, and the corresponding conclusions were made regarding possible defects and compliance with the reference performance indicators of the two resonators.