International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

The article presents the results of modeling quasi-stationary ultralow power electric fields (the order of tens of nanowatts) and establishes ranges of rational values of parameters (average density of electric voltage, specific potential) of these fields. As a result of mathematical modeling (based on a system of Gaussian equations) and subsequent numerical experiment, it is shown that an instantaneous increase in the average electric density of a quasi-static electric field in 2 times in one part of the field leads to an increase in charge redistribution time from 34 ns (at an initial density of electric tension of 17 nN/Ku.μm 3) to 189 ns (at a density of electric tension of 145 nN/Ku.μm3). This redistribution allows us to determine the range of rational values of the specific potential, which is 1.1… 9 nV/μm 2. In this case, the maximum specific power that can occur in such a field is 0.5… 0.77 nW/μm 2.

The article considers the peculiarities of the technology of creating a multiprobe system for nanometric measurements of geometric and mechanical properties of the surfaces of microsystem devices. This system is built on the sites of domain-dissipative structures formed by the method of combined electron-beam micromachining on piezoelectric ceramics of the grade “lead zirconate-titanate”. The fundamental problem of creating such a nanoinstrument – measuring probes is the difficulty of determining the exact location of the contact regions of these probes. A fundamentally new method of high-precision formation of contact regions by the electroplating capillary method is considered. It is shown that the application of this method will speed up 3.5 – 5.5 times the process of measuring geometric and mechanical surface parameters, as well as the sensitivity of the measurement process by 10 – 18%, which, in general, increase the productivity and reliability of determining these parameters of surfaces of microsystem devices on average – by 15 – 25%.

The article develops a simulation model (based on the MatLab Simulink mathematical processor) of an information-measuring system of electrical characteristics (residual surface electric charge, surface layer capacity, etc.) of functional coatings of electronic devices. The main purpose of the simulation model was to determine the rational parameters of measurement and control of the informationmeasuring system developed by the authors, which would simplify the process of setting up such a system, as well as explore the dynamic modes of its operation. The main advantage of the developed simulation model is the ability to conduct an interactive study of the operation of the information-measuring system under various, including limiting, modes. Tests of the simulation model of the information-measuring system made it possible to study its operation under various conditions and modes of the measurement experiment, as well as to virtually determine the rational operating parameters of such a measurement and control system. A satisfactory discrepancy of 8-11,5% was established for the experimental results compared with the data obtained analytically, which proves the correctness and adequacy of the compiled model.