The strategic initiative Industry 4.0 implies integration of Cyber-Physical Systems (CPS), Internet of Things (IoT) and cloud computing, leading to what is called “smart factory”. The lack of theoretical foundation and methodologies creates barriers that may hamper the adoption, commercialization, and market success of the new CPS applications. The reference frameworks and architectures support the analysis and specification of domains, and facilitates the unification of methods used by various disciplines such as industrial engineering, control theory, communication and information technology, thus making possible their combined use. The paper presents an analysis of the benefits and use of reference frameworks and architectures in the development of CPS. Standardized meta-models of reference frameworks and architectures are presented. Particular attention is paid to the NIST reference framework and architecture of CPS, with a view to establishing a methodology for development of Cyber-Physical Production Systems.