REGULARITIES OF ELECTRON-BEAM TECHNOLOGY INFLUENCE ON OPERATING CHARACTERISTICS OF OPTICAL ELEMENTS WITH NANODIMENSIONAL OXIDE COATINGS
It is determined, that electron-beam processing of elements from optical glasses with nanosized coatings from metal oxides leads to improvement of their physical and mechanical properties, that influence operational characteristics of elements: negative microdefects on the surface are excluded, its microporosity decreases by 5… 10%, as well as microroughness from 30… 35 nm to 9… 15 nm; the microhardness of the surface increases from 2,3…3,5 GPa to 23,7…24,9 GPa, thus the influence of the coating thickness on its value decreases by 30…40%; wear resistance increases by 7… 12% and service life of optical elements increases by 20… 30%. Mathematical model has been developed, allowing to pre-define critical modes of electron-beam processing of elements, control of which allows to prevent their possible destructions and increase the probability of nonfailure work at operation.