Abstract

The miniature and low-power devices with long service life in hard operating conditions like the 14C ß-decay energyconverters indeed with eternal resource for integrated MEMS and NEMS are considered. Authors will discuss how to create a power source for MEMS devices, based on SiC/Si porous structure, which are tested to be used as the β-decay energyconverter of radioactive carbon-14 into electrical energy. This is based on the silicon carbide obtaining by self-organizing mono 3C-SiC endotaxi on the Si substrate.