System analysis of impact negative bias potential on structure, substructure and mechanical characteristics of single-layer ZrN and multilayer ZrN/TiN coatings that been obtained by vacuum arc evaporation done at article with the aim of development of direction «Structural Engineering of Nitride coatings».
Obtained results have allowed to identify three levels of impact:
– macro- level (phase composition, macrostructure, macrostresses state);
– micro- level (preferred orientation of crystallites – texture);
– nano- level (size of areas of coherent scattering (crystallites), microdeformation).
Superhard state with the magnitude micro-hardness of 44.8 GPa been reached in ZrN/TiN coatings as a result of using Structural Engineering.