Machines. Technologies. Materials.
Vol. 13 (2019), Issue 1, pg(s) 26-28

Universal thermal microsystems based on silicon carbide

  • 1 Specialty microelectronics - Novgorod state University named after Yaroslav the wise; Open Society - OKB “Planeta”, Velikiy Novgorod

Abstract

The results of modeling the thermal characteristics of microsystems, evaluated mutual thermal influence of the elements depending on the type of construction.

Keywords

References

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