International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

Neutron polarizing super-mirrors are aperiodic multilayer structures made of alternating magnetic CoFe and non-magnetic TiZr layers deposited on glass or silicon substrates using the magnetron sputtering method. The polarizing ability of such super-mirrors and the efficiency of their use depend on the fine ratio of the thickness of the layers and the relative metal content in the layers [1, 2]. X-ray fluorescence analysis (XRF) is highly sensitive, but it has a rather large relative error, usually not less than 5%. An original X-ray spectrometer with a radioisotope source based on 109Cd was used to determine the content of Fe, Co, Ti, and Zr in super-mirror samples with sufficient accuracy to control their manufacturing technology. The XRF analysis was based on the direct external standard method taking into account absorption corrections. As a result, the relative metal content in the super-mirror layers was determined with a relative error of less than 1%.