International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

The article studies the mechanisms of energy exchange and transformations, which occur in a measuring instrument (probe) of an atomic force microscope (AFM) in the process of studying solid surfaces of materials. Mathematical modeling of the heating process of individual elements of the measuring unit of the atomic force microscope at the preparatory, final stages and the scanning stage of the surface under study was carried out. At the same time, such energy components of the processes occurring in the AFM control unit were taken into account. By minimizing the factors (heat dissipation due to friction of the probe on the surface), which negatively affect both the results of the monitoring and the condition of the probe and the surface, stable operation modes of the AFM are established. The solution of the equivalent thermal scheme of an atomic force microscope is presented, which confirms the adequacy of the mathematical models obtained.

The paper develops a methodology for controlling the spatial characteristics of a ribbon-shaped electron stream by determining the width of the low-energy ribbon-shaped electron stream and its concentration coefficient as a function of the distance of the electron gun to the processing object and the subsequent highly effective adjustment of the electron-optical system of the electron gun with a ribbonshaped stream shape during processing of optical coatings of optoelectronics products. It is established that the dependence of the width of the electron stream and the coefficient of its concentration at different distances from the object are nonlinear. The possibility of controlling the electron stream by adjusting the specific power and the distance to the processed object directly during the processing is shown, which allows qualitatively improving the metrological indexes of the processed articles: increase the accuracy of processing by 3-5%, the convergence of the results – by 15-18%, and also increase the stability of the parameters of the electron stream 1,6-2,1 times.