International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

Based on the electron-beam technology we suggest the method that increases accuracy and extends the ranges of optoelectronic device measurement, and also increases the probability of their trouble-free operation under conditions of external thermal and mechanical actions. The method is based on the developed experimentally-statistical models to determine the complex influence of parameters of the electron beam on the physical-mechanical properties and optical characteristics in the surface layers of optical elements. at At the stage of device manufacturing this method allows forming a database of the superior physical and mechanical properties and the optical characteristics in the surface layers of optical elements depending on the electron beam parameters, by choosing the optimal regimes of their electron-beam processing, that allow maximizing the metrological characteristics of the devices.