Abstract

The optimal parameters of the ranges of the electron beam are found (heat density, velocity, displacement), within which there is improvement of the physical and mechanical properties of surface layers of optical elements: there is no formation of negative defects on their surfaces which become atomically smooth (residual microscopic ridges do not exceed 0.5… 1.5 nm); the microhardness of the surface increases, hardened layers are formed with compressive stresses. This leads to the reduction of the light scattering coefficient of surface layers of elements and increase of their coefficient of infrared radiation transmittance and, ultimately, to the improvement of metrological characteristics and reliability of devices under intensive external thermal action.