Cyber-Physical Systems integrate computation, networking, and physical dynamics. Systems and computer science has provided a solid foundation for spectacular progress in modeling of engineering software application for real-time and embedded systems. This paper discusses and analyses the possibilities of using UML and its profiles to model cyber-physical systems. Two approaches for modeling of cyber-physical components based on the UML profile for system engineering – SysML and on the MARTE profile for analysis and modeling of real-time systems are respectively described. The presented approaches are illustrated with a simple example for modeling of feedback level control system. Finally some conclusions are made.