International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

The article considers the peculiarities of the technology of creating a multiprobe system for nanometric measurements of geometric and mechanical properties of the surfaces of microsystem devices. This system is built on the sites of domain-dissipative structures formed by the method of combined electron-beam micromachining on piezoelectric ceramics of the grade “lead zirconate-titanate”. The fundamental problem of creating such a nanoinstrument – measuring probes is the difficulty of determining the exact location of the contact regions of these probes. A fundamentally new method of high-precision formation of contact regions by the electroplating capillary method is considered. It is shown that the application of this method will speed up 3.5 – 5.5 times the process of measuring geometric and mechanical surface parameters, as well as the sensitivity of the measurement process by 10 – 18%, which, in general, increase the productivity and reliability of determining these parameters of surfaces of microsystem devices on average – by 15 – 25%.

It has been established that in the study of a solid surface by atomic force microscopy, the hydrophobic interaction is more advantageous due to a decrease in the interaction forces between the probe and the liquid adsorbed on the surface under study. Despite the fact that silicon is a hydrophobic material, it has been shown that the material acquires hydrophilic properties in air, as a result of which the use of carbon-modified probes has been proposed. An approach to experimental statistical modeling is proposed, based on the experiment planning method, which shows that with a scanning speed of 12 μm / s, a scanning step of up to 82 nm and a delay time before scanning of 6 ms, the interaction force between the probe and the adsorbed liquid reaches minimum values. As a result of the research, it was found that with a decrease in the scanning speed, a scanning step and an increase in the delay time of the probe before measurement, the interaction between the probe and the liquid membrane is hydrophobic. It is shown that by changing the initial parameters, it is possible to control the hydrophobic interaction between the probe and the liquid. It has been established that increased air humidity leads to hydrophilic interaction. This is due to the increase in the thickness of the adsorbed liquid layer on the surface under study.