Features of creation of multiprobe system for nanometric measurements of geometrical and mechanical properties of surfaces of microsystem devices

  • 1 Cherkasy State Technological University, Cherkasy, Ukraine


The article considers the peculiarities of the technology of creating a multiprobe system for nanometric measurements of geometric and mechanical properties of the surfaces of microsystem devices. This system is built on the sites of domain-dissipative structures formed by the method of combined electron-beam micromachining on piezoelectric ceramics of the grade “lead zirconate-titanate”. The fundamental problem of creating such a nanoinstrument – measuring probes is the difficulty of determining the exact location of the contact regions of these probes. A fundamentally new method of high-precision formation of contact regions by the electroplating capillary method is considered. It is shown that the application of this method will speed up 3.5 – 5.5 times the process of measuring geometric and mechanical surface parameters, as well as the sensitivity of the measurement process by 10 – 18%, which, in general, increase the productivity and reliability of determining these parameters of surfaces of microsystem devices on average – by 15 – 25%.



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