Machines. Technologies. Materials.
Vol. 14 (2020), Issue 7, pg(s) 268-271

TECHNOLOGIES

Features of creation of multiprobe system for nanometric measurements of geometrical and mechanical properties of surfaces of microsystem devices

  • 1 Cherkasy State Technological University, Cherkasy, Ukraine

Abstract

The article considers the peculiarities of the technology of creating a multiprobe system for nanometric measurements of geometric and mechanical properties of the surfaces of microsystem devices. This system is built on the sites of domain-dissipative structures formed by the method of combined electron-beam micromachining on piezoelectric ceramics of the grade “lead zirconate-titanate”. The fundamental problem of creating such a nanoinstrument – measuring probes is the difficulty of determining the exact location of the contact regions of these probes. A fundamentally new method of high-precision formation of contact regions by the electroplating capillary method is considered. It is shown that the application of this method will speed up 3.5 – 5.5 times the process of measuring geometric and mechanical surface parameters, as well as the sensitivity of the measurement process by 10 – 18%, which, in general, increase the productivity and reliability of determining these parameters of surfaces of microsystem devices on average – by 15 – 25%.

Keywords

References

  1. J.Vetelino, A.Reghu, Introduction to Sensors, (CRC Press, Boca Raton, FL, 2011).
  2. Vo Thanh Tung, S.A.Chizhik, Tran Xuan Hoai, et. al., Scanning probe microscopy. Physical properties estimation, (InTech, Rijeka, Croatia, 2012).
  3. S.O.Abetkovskaia, A.P.Pozdnyakov, S.V.Siroezkin, S.A.Chizhik, Computer simulation of dynamic atomic force microscopy, (Springer, Berlin, Heidelberg, 2007).
  4. I.I.Bondarenko, V.V.Medianyk, М.А.Bondarenko, V.S.Titarenko, in: Scientific and Technical Conference “Physics, electronics, electrical engineering”, (Sumy, Feb. 05-09, 2018), p. 86.
  5. O.Andriienko, V.Medyanyk, S.Bilokin, et. al., Int. J. Mach. Technol. Mater., 5, 13 (2019) <https://stumejournals.com/ journals/mtm/2019/5/217.full.pdf>.
  6. E.Meyer, H.J.Hug, R.Bennewitz, Scanning Probe Microscopy: The Lab on a Tip, (Springer, Berlin, 2013).
  7. M.Bondarenko, I.Bondarenko, V.Antoniuk, et. al., Int. J. Mater. Sci., Nonequilib. Phase Transform., 2, 3 (2017) <https://stumejournals.com/journals/ms/2017/2/53.full.pdf>.
  8. V.S.Antonyuk, S.O.Bilokin, M.О.Bondarenko, et. al., J. Superhard Mater., 2, 37 (2015), pp. 112-119.
  9. V.S.Antonyuk, M.A.Bondarenko, Yu.Yu.Bondarenko, J. Superhard Mater., 4, 34 (2012), pp. 248-255.
  10. B.D.Huey, J.Luria, D.A.Bonnell, Scanning Probe Microscopy in Materials Science, (Springer, Cham, 2019).
  11. A.Suslov, M.Bondarenko, O.Andrienko, in: VII International Scientific and Technical Conference “Sensors, devices and systems”, (Lazurne, Sept. 17-21, 2018), pp. 80-82.
  12. V.Titarenko, S.Bilokin, M.Bondarenko, et. al., Int. J. Innov., 2, 6 (2018) <https://stumejournals.com/journals/innovations/2018/2/ 72.full.pdf.

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