Determination of geometric parameters of gradient structures formed in optical glass by the electron beam method

  • 1 Faculty of computer engineering technology and design
  • 2 Faculty of Electronically Technologies and Robotics

Abstract

The results of experimental studies of the geometry of gradient structures formed in optical glass by the method of electron-beam modification of its surface are presented. The expediency of using the atomic force microscopy method for determining the geometrical parameters of microlayers formed in the surfaces of optical materials by the method of their electron-beam modification is substantiated. A new method for determining the basic geometric parameters (thickness of the gradient layer, topology of the interface “gradient layer – the basis of the material”, surface microrelief, etc.) gradient structures, based on the method of atomic force microscopy is proposed. The proposed method is based on the principle of the complex application of various operating modes of an atomic-force microscope (the results of the instrument operation are considered, both in contact and in non-contact modes) in one measurement cycle. According to the proposed method, the dependencies between the change in the refractive index and the modes of electron-beam modification of the optical glass surface, as well as the dependence between the electron-beam effect modes and the geometric parameters of the gradient structure on the glass (thickness of the gradient structure, surface microrelief and interface between the layers and the base material ). The possibility of predicting the development of hidden microdefects at the interface “gradient layer – the basis of the material” is shown. Proved high reliability and adequacy of the proposed method by comparing the results obtained with the results of determining the geometric parameters obtained by other alternative methods.

Keywords

References

  1. Pokryttia u pryladobuduvanni (Coatings in instrument making) [Tekst]: monohrafiia / V.S.Antoniuk, H.S.Tymchyk, Yu.Iu.Bondarenko, Yu.I.Kovalenko, M.O.Bondarenko ta in. // K.: NTUU «KPI», 2016. – 360 s.
  2. Tekhnolohichni osnovy otrymannia metalizovanykh pokryttiv na vyrobakh mikrooptyky ta nanoelektroniky elektronno-promenevym metodom (Technological bases for obtaining metallized coatings on micro-optical products and nanoelectronics by electron-beam method) / V.A.Vashchenko, H.V.Kanashevych, S.M.Vashchenko, M.O.Bondarenko i dr. // Zvit z NDR (MONU); № DR 0103U003689. – Kiyv, 2004. – 63 s.
  3. Specіal'nі metodi obrobki optichnogo skla (Special methods of optical glass processing) [Tekst]: monohrafiia / G.V.Kanashevich, D.І.Kotel'nіkov, V.A.Vashchenko; pіd red. Profess. D.І. Kotel'nikova. – CHernіgіv: “Sіvers'ka dumka”, 2002. – 215 s.
  4. Pryklady zastosuvannia fizychnykh metodiv doslidzhennia struktury poverkhni (Examples of the application of physical methods for studying the structure of the surface) [Tekst]: monohrafiia / H.M.Dubrovska, N.I.Bozhko, M.O.Bondarenko, H.V.Kanashevych ta in. // Silkhet: Shobuzh Biponi, Udoun Ofset Prynters, 2007. – 248 s.
  5. Fynn A.M. Rekonstruktsyia ostatochnыkh napriazhenyi v hradyentnыkh sredakh pry prodolnom prosvechyvanyy (Reconstruction of residual stresses in gradient media with longitudinal translucency) [Tekst]: monohrafiia. - SPbHPU, 2005. – 77s.
  6. Bondarenko M. Peculiarities of metalized surfaces modification of silicon elements of microelectromechanical systems with lowpower electronic flow / M.Bondarenko, I.Bondarenko, V.Antoniuk etc. // Materials science. Non-equilibrium phase transformations. – 2017. – Year III. – Issue 2. – pp.53-55.
  7. Yatsenko I., Antoniuk V., Bondarenko M., Vashchenko V. Influence of parameters by electronic ray on properties of superficial layers of optical elements of exact instrument-making, in Proc. Intern. scien.-tech. conf. “Innovations in ingeneering”, 9-12 september 2015. – Burgas, Bulgaria. – Vol. 20/183. – 2015. – pp. 64-66.
  8. Kanashevich G.V. Tekhnologichni mozhlivost elektronnopromenevo obrobki optichnogo skla (Technological possibilities of electron beam processing of optical glass) / Visnik CHITI, 1998, No.3. – S. 48-55.
  9. Lisochenko V.N. Razrabotka elementov integralno-opticheskikh skhem novymi metodami na osnove elektronno-luchevoi obrabotki (Development of elements of integrated-optical circuits by new methods based on electron-beam processing) / V.N.Lisochenko, G.V.Kanashevich, V.A.Vashchenko i dr. // Otchet po NIR Cherkasskogo filiala KPI. – Cherkassy, 1993. – 205 s.
  10. Yurkovych N.V., Mar‟yan M.I. The processes formation of thin-film heterogeneous structures based on Ge2S3 glass in dependence of the technologies conditions of their preparation. – Uzhhorod University Scientific Herald. Series Physics. – Iss. 28, 2010. – рр. 64 – 69.
  11. Diagnostics of functional layers in products of micro-optics and nanoelectronics obtained by electronic technologies (Diagnostics of functional layers in the products of micro-optics and nanoelectronics obtained by electronic technologies) / V.A.Vashchenko, H.V.Kanashevych, M.O.Bondarenko i dr. // Zvit z NDR (MONU); № DR 0106U004500. – Cherkassy, 2008. –192 s.
  12. Kovalenko Yu.I., Bondarenko M.O., Bondaren-ko Yu.Iu., Vplyv rezhymiv ultrazvukovoho ochyshchennia p„iezoelektrychnykh elementiv na yakist sformovanykh na yikhnikh poverkhniakh sribnykh elektrodiv (Influence of modes of ultrasonic cleaning of piezoelectric elements on the quality of silver electrodes formed on their surfaces) // Visnyk Natsionalnoho tekhnichnoho universytetu Ukrainy “Kyivskyi politekhnichnyi instytut”. Mashynobuduvannia, № 64, 2012. – s. 87-90.
  13. Bondarenko M.O., Vashchenko V.A., Reva Y.A., Bondarenko Yu.Iu. Metodyka yzmerenyia tolshchyn tonkykh nesploshnykh pokrytyi na dyelektrycheskykh poverkhnostiakh metodom atomnosylovoi mykroskopyy (Method of measuring the thickness of thin non-permeable coatings on dielectric surfaces by atomic force microscopy), na XVIII mezhdunar. konf. Sovremennye metody y sredstva nerazrush. kontrolia y tekhnycheskoi diahnostyky, Yalta, 2010, s. 209-212.
  14. M.O. Bondarenko ta in. Otsinka adheziinoi mitsnosti na styrannia oksydnykh pokryttiv na optychnomu skli metodom atomno-sylovoi mikroskopii (Estimation of adhesive strength for abrasion of oxide coatings on optical glass by atomic force microscopy), na XII mizhnar. nauk.-tekhn. konf. Pryladobuduvannia: stan i perspektyvy, Kyiv, 2013, s. 207.
  15. S.A. Bylokon, M.A. Bondarenko, V.A. Andryenko, ta V.S. Antoniuk Yssledovanye mykrotverdosty tonkykh plenok metodom nanoyndentyrovanyia s pomoshchiu atomno-sylovoi mykroskopyy (Investigation of Microhardness of Thin Films by Nanoindentation by Nuclear Force Microscopy), na XIII mezhdunar. nauchno-prakt. konf. Kachestvo, standartyzatsyia, kontrol: teoryia y praktyka. – Kyev, 2013. – s. 20-21.
  16. Antoniuk V.S., Bondarenko M.O., Bondarenko Yu.Iu., Bilokin S.O. Sklerometrychna otsinka znosostiikosti tonkykh pokryttiv metodom atomno-sylovoi mikroskopii (Scrollometric evaluation of wear resistance of thin coatings by atomic force microscopy), na XV Mezhdunar. nauch.-tekhn. konf. Ynzheneryia poverkhnosty y renovatsyia yzdelyi. – Kyev, 2015, s. 17-19.

Article full text

Download PDF