INNOVATIVE SOLUTIONS
THE INVESTIGATION OF THE NANORELIEFS OF OPTICAL ELEMENTS OF MEASURING INSTRUMENTS, WHICH MODIFIED BY ELECTRONBEAM MICROPROCESSING
- 1 Faculty of Electronically Technologies, Cherkassy State Technological University, Ukraine
- 2 Department of Physics, Cherkassy State Technological University, Ukraine
- 3 Faculty of instrument-making, National Technical University of Ukraine “KPI”, Ukraine
Abstract
The results of microprocessing by the ribbon-shaped electron beam of the elements of optical measuring instruments (the material of such elements – K8 glass) with the initial nanorelief of surfaces 15-22 nm after industrial grinding and polishing are presented. Based on the results of studies using a computerized complex control system based on an atomic force microscope, it was established that after electron-beam microprocessing, the nanorelief of optical elements of measuring instruments decreased to 1.5-2.2 nm, satisfying to the requirements put forward to their surfaces.