INNOVATIVE SOLUTIONS
DESTRUCTION OF SILICONE PROBES OF THE ATOMIC FORCE MICROSCOPE CAUSED BY THE ELECTROSTATIC BREAKDOWN DURING SCANNING OF DIELECTRIC SURFACES
- 1 Faculty of Electronically Technologies and Robotics – Cherkassy State Technological University, Ukraine
- 2 Faculty of instrument-making – National Technical University of Ukraine “Igor Sikorsky Kyiv Polytechnic Institute”, Ukraine 2
Abstract
The results of microprocessing by the ribbon-shaped electron beam of the elements of optical measuring instruments (the material of such elements – K8 glass) with the initial nanorelief of surfaces 15-22 nm after industrial grinding and polishing are presented. Based on the results of studies using a computerized complex control system based on an atomic force microscope, it was established that after electron-beam microprocessing, the nanorelief of optical elements of measuring instruments decreased to 1.5-2.2 nm, satisfying to the requirements put forward to their surfaces.