International Scientific Journals
of Scientific Technical Union of Mechanical Engineering "Industry 4.0"

  • Journals
  • Submission
  • Events
  • About us
  • Contact

Author: Ivan Kostic

  • DOMINANT TECHNOLOGIES IN “INDUSTRY 4.0”

    Optimization of electron beam lithography processing of resist AR-N 7520

    • Elena Koleva
    • Ivan Kostic
    • Lilyana Koleva
    • Katia Vutova
    • Irina Markova
    • Anna Bencurova
    • Anna Konecnikova
    • Robert Andok
    Industry 4.0, Vol. 6 (2021), Issue 5, pg(s) 189-191
    • Abstract
    • View Article
    •  Article PDF

    This work presents experimental and theoretical investigation of exposed and developed negative electron resist AR-N 7520 profiles using electron beam lithography system ZBA23 (Raith) at variation of the exposure doses and pre-defined exposure pattern. Several overall geometry quality criteria for the shape of the developed resist profile cross-sections are defined. Empirical models are estimated for the dependence of overall geometry characteristics of the obtained resist profiles on the exposure dose. These overall quality characteristics are used for defining of technological requirements for the formed profiles and for obtaining optimal regimes by multicriterial optimization.

Congresses and conferences

  • VII International Scientific Conference
    "High Technologies. Business. Society"
    07.-10.03.2022 - Borovets, Bulgaria
  • XV International Conference for Young Researchers
    "Technical Sciences. Industrial Management"
    09.-12.03.2022 - Borovets, Bulgaria
  • XIX International Congress
    "Machinеs. Technolоgies. Materials"
    winter session
    09.-12.03.2022 - Borovets, Bulgaria
  • XXVIII International Scientific Technical Conference
    "Foundry"
    06.-08.04.2022 - Pleven, Bulgaria
  • X International Scientific Conference
    "Engineering. Technologies. Education. Safety"
    06.-09.06.2022 - Borovets, Bulgaria
  • XXX International Scientific Conference
    "trans&MOTAUTO"
    20.-23.06.2022 - Burgas, Bulgaria
  • VIII International Scientific Congress
    "Innovations"
    20.-23.06.2022 - Varna, Bulgaria
  • X International Scientific Congress
    "Agricultural Machinery"
    21.-25.06.2022 - Burgas, Bulgaria
  • VII International Scientific Conference
    "Industry 4.0"
    summer session
    22.-25.06.2022 - Varna, Bulgaria
  • VII International Scientific Conference
    "Conserving Soils and Water"
    24.-27.08.2022 - Borovets, Bulgaria
  • VIII International Scientific Conference
    "Materials Science. Non-Equilibrium Phase Transformations"
    05.-08.09.2022 - Varna, Bulgaria
  • XVII International Congress
    "Machines. Technologies. Materials"
    summer session
    07.-10.09.2022 - Varna, Bulgaria
  • VI International Scientific Conference on Security
    "Confsec"
    05.-08.12.2022 - Borovets, Bulgaria
  • VII International Scientific Conference
    "Industry 4.0"
    winter session
    07.-10.12.2022 - Borovets, Bulgaria
  • VI International Scientific Conference
    "Mathematical Modeling"
    07.-10.12.2022 - Borovets, Bulgaria

Scientific Technical Union of Mechanical Engineering "Industry-4.0"

108, Rakovski Str., 1000 Sofia, Bulgaria
tel. (+359 2) 987 72 90, tel./fax (+359 2) 986 22 40,
office@stumejournals.com